Description:
Springer-Verlag Publishing, 2004. 1. Hardcover. Very Good. Very Good; Hardcover; Covers are still glossy with a few light handling-marks; Unblemished textblock edges; The endpapers and all text pages are clean and unmarked; The binding is excellent with a straight spine; This book will be shipped in a sturdy cardboard box with foam padding; Medium Format (8.5" - 9.75" tall); 1.7 lbs; Tan, red, and gray covers with title in white lettering; 2004, Springer-Verlag Publishing; 439 pages; "Chemical Mechanical Planarization of Semiconductor Materials," by M.R. Oliver.
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Chemical-Mechanical Planarization of Semiconductor Materials Hardcover - 2004 - 2004th Edition
by M. R. Oliver (Editor)
From the rear cover
This volume is a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, which is now a major part of state-of-the-art semiconductor technology. There are detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
Details
- Title Chemical-Mechanical Planarization of Semiconductor Materials
- Author M. R. Oliver (Editor)
- Binding Hardcover
- Edition number 2004th
- Edition 2004
- Pages 428
- Volumes 1
- Language ENG
- Publisher Springer, Secaucus, New Jersey, U.S.A.
- Date 2004-01-26
- Illustrated Yes
- Features Bibliography, Illustrated, Index
- ISBN 9783540431817 / 3540431810
- Weight 1.75 lbs (0.79 kg)
- Dimensions 9.21 x 6.14 x 1 in (23.39 x 15.60 x 2.54 cm)
- Library of Congress Catalog Number 2003059075
- Dewey Decimal Code 541
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Chemical Mechanical Planarization of Semiconductor Materials
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Chemical Mechanical Planarization of Semiconductor Materials
by Oliver, M.R. [Editor]
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Springer. Hardcover. New. New. In shrink wrap. Looks like an interesting title!
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Chemical Mechanical Planarization of Semiconductor Materials
by Oliver, M.R. [Editor]
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- Hardcover
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