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Fundamentals of Semiconductor Fabrication Paperback - 2003 - 1st Edition
by Gary S. May; Simon M. Sze
From the rear cover
This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition.
- The book integrates Computer Modeling & Simulation tools throughout.
- Process simulation is used as a tool for what-if analysis and discussion.
- Comprehensive coverage of process sequences helps readers connect individual steps into a cohesive whole.
Details
- Title Fundamentals of Semiconductor Fabrication
- Author Gary S. May; Simon M. Sze
- Binding Paperback
- Edition number 1st
- Edition 1
- Pages 320
- Volumes 1
- Language ENG
- Publisher Wiley
- Date 2003-04-11
- Illustrated Yes
- Features Bibliography, Illustrated, Index
- ISBN 9780471232797 / 0471232793
- Weight 1.2 lbs (0.54 kg)
- Dimensions 9.9 x 7 x 0.9 in (25.15 x 17.78 x 2.29 cm)
- Library of Congress subjects Integrated circuits - Design and construction, Semiconductors - Design and construction
- Library of Congress Catalog Number 2003276248
- Dewey Decimal Code 621
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Fundamentals of Semiconductor Fabrication
by Simon M. Sze; Gary S. May
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Wiley & Sons, Incorporated, John, 2003. Paperback. Very Good. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less.Dust jacket quality is not guaranteed.
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Fundamentals of Semiconductor Fabrication
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Fundamentals of Semiconductor Fabrication
by May, Gary S.; Sze, Simon M.
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Fundamentals of Semiconductor Fabrication
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Fund Semiconductor Fabrication
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