Surfaces, Interfaces, and Films for Microelectronics Hardcover - 2008
by Eugene A. Irene
From the rear cover
The practical, accessible independent-study guide and text on surface science fundamentals and microelectronics processes
Electronic and microelectronic materials are vital to technologies such as semiconductors, integrated circuits, magnetic alloys, insulators, and optical/display materials.? The microelectronic material surfaces, interfaces, and films play an important role in their function. Detailing fundamentals and important analytical techniques, this reference helps scientists and engineers in this rapidly growing field understand existing microelectronic applications and design new ones. After an introduction to essential key concepts, Surfaces, Interfaces, and Thin Films for Microelectronics:
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Provides a thorough explanation of surface science fundamentals, covering both geometric and electronic structure, surface thermodynamics, morphology, and a sampling of surface science techniques
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Discusses microelectronics processes, covering films and interfaces, electronic passivation of semiconductor-dielectric film interfaces, the Si-SiO2 interface, and other MOSFET interfaces
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Includes figures, charts, exercises, and numerous examples of applications to enhance and ingrain understanding
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Provides references to other resources for further study
With its accessible explanations of both fundamentals and microelectronics processes, this is the ideal self-study guide to help professionals in the electronics industry get up to speed fast. It is also an excellent text for upper-level undergraduate and graduate students taking materials science, chemistry, physics, and electrical engineering courses.
Details
- Title Surfaces, Interfaces, and Films for Microelectronics
- Author Eugene A. Irene
- Binding Hardcover
- Edition Edition:1
- Pages 536
- Volumes 1
- Language ENG
- Publisher Wiley-Interscience, New Delhi
- Date February 8, 2008
- Illustrated Yes
- ISBN 9780470174470 / 0470174471
- Weight 1.94 lbs (0.88 kg)
- Dimensions 9.1 x 6.5 x 1.24 in (23.11 x 16.51 x 3.15 cm)
- Library of Congress subjects Microelectronics - Materials, Thin films
- Library of Congress Catalog Number 2007024692
- Dewey Decimal Code 621.381
Media reviews
Citations
- Scitech Book News, 06/01/2008, Page 49
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