Skip to content

Micro-And Nanopatterning Polymers
Stock Photo: Cover May Be Different

Micro-And Nanopatterning Polymers Hardcover - 1998

by Hiroshi Ito (Editor); Elsa Reichmanis (Editor); Omkaram Nalamasu (Editor)


From the publisher

Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning
techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions of
material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is an
important step in the development of integrated circuits.

Details

  • Title Micro-And Nanopatterning Polymers
  • Author Hiroshi Ito (Editor); Elsa Reichmanis (Editor); Omkaram Nalamasu (Editor)
  • Binding Hardcover
  • Edition 1st
  • Pages 400
  • Volumes 1
  • Language ENG
  • Publisher American Chemical Society, NY
  • Date 1998-10
  • Illustrated Yes
  • ISBN 9780841235816 / 0841235813
  • Weight 1.55 lbs (0.70 kg)
  • Dimensions 9.1 x 5.9 x 1 in (23.11 x 14.99 x 2.54 cm)
  • Library of Congress Catalog Number 98025955
  • Dewey Decimal Code 621.381
Back to Top

More Copies for Sale

Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Series,  No. 706)

Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Series, No. 706)

by Ito, Hiroshi ; Reichmanis, Elsa ; Nalamasu, Omkaram & Ueno, Takumi (editors)

  • Used
  • very good
  • Hardcover
  • first
Condition
Used - Very Good
Edition
1st
Binding
Hardcover
ISBN 10 / ISBN 13
9780841235816 / 0841235813
Quantity Available
1
Seller
Hagerstown, Maryland, United States
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
€7.80
€6.81 shipping to USA

Show Details

Description:
NY: American Chemical Society Publication , 1988. First Edition, First Printing; glossy c; publisher's mark on bottom edge; title page missing; Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. 386 clean, unmarked pages. 1st. Hard Cover. Very Good/No Jacket as Issued. Illus. by Charts, Graphs, Diagrams. 8 vo.
Item Price
€7.80
€6.81 shipping to USA
MICRO- AND NANOPATTERNING POLYMERS
Stock Photo: Cover May Be Different

MICRO- AND NANOPATTERNING POLYMERS

by UENO, TAKUMI,

  • New
  • first
Condition
New
Edition
1St
ISBN 10 / ISBN 13
9780841235816 / 0841235813
Quantity Available
5
Seller
New Delhi, India
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
€62.38
€9.45 shipping to USA

Show Details

Description:
A Chemical, 1998. 1St. Unknown Binding. New/New.
Item Price
€62.38
€9.45 shipping to USA
MICRO- AND NANOPATTERNING POLYMERS
Stock Photo: Cover May Be Different

MICRO- AND NANOPATTERNING POLYMERS

by UENO, TAKUMI,

  • Used
  • first
Condition
UsedLikeNew
Edition
1St
ISBN 10 / ISBN 13
9780841235816 / 0841235813
Quantity Available
5
Seller
New Delhi, India
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
€62.38
€9.45 shipping to USA

Show Details

Description:
A Chemical, 1998. 1St. Unknown Binding. UsedLikeNew/UsedLikeNew.
Item Price
€62.38
€9.45 shipping to USA
Micro- and Nanopatterning Polymers
Stock Photo: Cover May Be Different

Micro- and Nanopatterning Polymers

by Ueno, Takumi,

  • New
Condition
New
ISBN 10 / ISBN 13
9780841235816 / 0841235813
Quantity Available
1
Seller
New Delhi, India
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
€91.35
€4.73 shipping to USA

Show Details

Description:
New/New. Brand New Original US Edition, Perfect Condition. Printed in English. Excellent Quality, Service and customer satisfaction guaranteed!
Item Price
€91.35
€4.73 shipping to USA
Micro- and Nanopatterning Polymers
Stock Photo: Cover May Be Different

Micro- and Nanopatterning Polymers

by Ueno, Takumi,

  • New
Condition
NEW
ISBN 10 / ISBN 13
9780841235816 / 0841235813
Quantity Available
1
Seller
NEW DELHI, Delhi, India
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
€107.52
€14.17 shipping to USA

Show Details

Description:
A Chemical. NEW. Brand New Book May dispatch from the US or the UK Standard Delivery is usually 5 to 7 days Tracking whenever available
Item Price
€107.52
€14.17 shipping to USA
Micro- and Nanopatterning Polymers
Stock Photo: Cover May Be Different

Micro- and Nanopatterning Polymers

  • Used
  • Hardcover
Condition
Used
Binding
Hardcover
ISBN 10 / ISBN 13
9780841235816 / 0841235813
Quantity Available
1
Seller
Woodside, New York, United States
Seller rating:
This seller has earned a 5 of 5 Stars rating from Biblio customers.
Item Price
€109.18
€3.77 shipping to USA

Show Details

Description:
American Chemical Society ACS , pp. 386 . Hardback. Used.
Item Price
€109.18
€3.77 shipping to USA